Work separation device and work separation method

摘要

The purpose of the present invention is to easily peel a support body off a workpiece by irradiating the support body with uniform laser light regardless of the size of a laminated body and the thickness of the workpiece. A workpiece separation device according to the present invention is characterized in that: the workpiece separation device is provided with a holding member for attachably/detachably holding a workpiece in a laminated body in which the workpiece, including a circuit board, and a support body that transmits laser light are laminated with a separation layer interposed therebetween, said separation layer becoming peelable at least by absorbing laser light, a light radiation unit for radiating laser light towards the separation layer through the support body of the laminated body held by the holding member, a drive unit for relatively moving, at least in a direction intersecting the direction of light radiated from the light radiation unit, the position of light that is radiated from the light radiation unit to the support body and the separation layer of the laminated body held by the holding member, and a control unit for controlling the operation of the light radiation unit and the drive unit; the light radiation unit has a laser scanner for moving the optical axis of spot-shaped laser light generated by a light source comprising a laser oscillator and is configured to sweep relative to the laminated body; the entire radiation surface of the separation layer irradiated with light from the light radiation unit is partitioned into a plurality of radiation areas; and the control unit performs control so that one radiation area of the plurality of radiation areas is filled entirely with many beams of laser light without a gap by arranging, at least through the operation of the laser scanner, radiation of laser light from the light radiation unit to the one radiation area of the plurality of radiation areas in two directions intersecting the light radiation direction, and thereafter irradiating the next radiation area with laser light is repeated in the same manner, thus eventually irradiating all of the plurality of radiation areas.