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Vacuum linear motor mover

机译:真空直线电机动子

摘要

The invention provides a rotor of a linear motor used for vacuum. Even plate thickness of a tank is not increased, a gap between a rotor and a stator is reduced as much as possible by using a simple structure to inhibit deformation, and the rotor of the linear motor used for the vacuum is used in a system in the same atmosphere. A stator 2 formed by arranging magnets 1 in a row ad a rotor 3 moved in the arrangement direction of the magnets 1, an accommodation part 4 having an accommodation coil and an opening part, and a cover part 5 of the opening part used to close the accommodation part 4 are provided, and in addition, reinforced ribs 6 are disposed on the bottom surface of the accommodation art 4 opposite to the cover part 5 used to closing the opening part or the cover part 5, and with the help of the reinforced ribs, the reinforced ribs 6 and the cover part 5 or the accommodation part 4 are fixedly connected together.
机译:本发明提供了一种用于真空的线性电动机的转子。通过使用简单的结构来抑制变形,即使不增加罐的板厚,也可通过减小变形来尽可能地减小转子与定子之间的间隙,并且将用于真空的线性电动机的转子用于系统中。同样的气氛。定子2是通过将磁铁1并排配置而形成的,该定子2沿磁铁1的排列方向移动的转子3,具有收纳线圈和开口部的收纳部4,以及用于封闭的开口部的盖部5。设有容纳部4,另外,在容纳件4的与用于封闭开口部或盖部5的盖部5相对的底面上设置有加强肋6,该加强肋6借助于加强筋6而被设置。肋,加强肋6和盖部5或容纳部4固定地连接在一起。

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