An X-ray spectroscopic analyzer and a chemical state analysis method using the X-ray spectroscopic analyzer.

摘要

The X-ray spectroscopic analyzer (10) includes an excitation source (11) for irradiating a predetermined irradiation region (A) on the surface of the sample (S) with an excitation line for generating characteristic X-rays, and an irradiation region (A). A predetermined spectroscopic crystal (13) made of a flat plate and an irradiation region (A) and a spectroscopic crystal (13) provided between the irradiation region (A) and the spectroscopic crystal (13) facing the surface. X-rays provided so that a slit (12) parallel to the crystal plane and a linear detection element (141) having a length in a direction parallel to the slit (12) are arranged in a direction perpendicular to the slit (12). By irradiating the surface of the linear sensor (14) and the standard sample that generates two characteristic X-rays whose energies are known by irradiating the excitation line with the excitation source (11), the 2 Energy for measuring one characteristic X-ray and calibrating the energy of the characteristic X-ray detected by each of the detection elements (141) of the X-ray linear sensor (14) based on the energy of the two measured characteristic X-rays. It is provided with a calibration unit (16). The energy of the characteristic X-ray emitted by the sample to be measured can be obtained with higher accuracy.