METHOD FOR MANUFACTURING STRUCTURE WITH HIGH ASPECT RATIO, STRUCTURE WITH HIGH ASPECT RATIO AND X-RAY IMAGING APPARATUS

摘要

To provide a method for manufacturing a structure with a high aspect ratio, by which sticking can be further reduced, the above structure, and an X-ray imaging apparatus using the structure.SOLUTION: The method for manufacturing a structure includes steps of: forming, on at least one main surface of a predetermined substrate, a plurality of holes extending in a direction intersecting the main surface; forming, on the main surface where the plurality of holes is formed, a resist layer having a plurality of first regional portions extending in one direction and periodically arranged in a first intersection direction intersecting the first direction at a predetermined interval and a plurality of second regional portions arranged as extending in a second intersection direction intersecting the first direction between the adjoining first regional portions; and immersing the substrate in an etching solution so as to wet etch the substrate in portions corresponding to each region between the plurality of first regional portions and to each region below the plurality of second regional portions, so as to form a plurality of periodical recesses in the first intersection direction in the substrate.SELECTED DRAWING: Figure 1