首页>
外国专利>
Film stabilization through novel materials modification of beamline components
Film stabilization through novel materials modification of beamline components
展开▼
机译:通过对光束线组件进行新颖的材料改性来稳定薄膜
展开▼
页面导航
摘要
著录项
相似文献
摘要
An electrically conductive component is provided for a near-wafer environment of an ion implantation system, where the component has a carbon-based substrate having a microscopically textured surface overlying a macroscopically textured surface. The macroscopically textured surface is a mechanically, chemically, or otherwise roughened surface. The microscopically textured surface can be a converted surface formed by a chemical reaction forming a non-stoichiometric silicon and carbon surface. The one or more components can be a dose cup, exit aperture, and tunnel wall. The carbon-based substrate can be graphite. The microscopically textured surface can be a modified graphite surface. No defined interface layer exists between the microscopically textured surface and macroscopically textured surface. The carbon-based graphite is selected based on a final porosity and grain size of the graphite.
展开▼