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Vertically-coupled surface-etched grating DFB laser

机译:垂直耦合表面蚀刻光栅DFB激光器

摘要

A VCSEG-DFB laser, fully compatible with MGVI design and manufacturing methodologies, for single growth monolithic integration in multi-functional PICs is presented. It comprises a laser PIN structure, in mesa form, etched from upper emitter layer top surface through the active, presumably MQW, gain region, down to the top surface of the lower emitter. Lower electrical contacts sit adjacent the mesa disposed on the lower emitter layer with upper strip contacts disposed atop the upper emitter layer on the mesa top. An SEG is defined/etched from mesa top surface, between the upper strip contacts, through upper emitter layer down to or into the SCH layers. Vertical confinement is provided by the SCH structure and the lateral profile in the bottom portion of the mesa provides lateral confinement. The guided mode interacts with the SEG by the vertical tail penetrating the SEG and evanescent field coupling to the SEG.
机译:提出了一种与MGVI设计和制造方法完全兼容的VCSEG-DFB激光器,用于在多功能PIC中进行单生长单片集成。它包括台面形式的激光PIN结构,该结构从上发射极层顶面经过有源(大概为MQW)增益区域,向下蚀刻到下发射极的顶面,进行蚀刻。下部电触点位于设置在下部发射极层上的台面附近,而上部条形触点设置在台面顶部的上部发射极层的顶部。 SEG是从台面顶部表面(在上部带状触点之间),通过上部发射极层一直向下或进入SCH层定义/蚀刻的。 SCH结构提供垂直限制,台面底部的侧面轮廓提供了侧面限制。引导模式通过垂直尾部穿透SEG以及与SEG耦合的e逝场与SEG相互作用。

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