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Bias control for capacitive micromachined ultrasonic transducers
Bias control for capacitive micromachined ultrasonic transducers
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机译:电容式微加工超声换能器的偏置控制
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摘要
In some examples, a CMUT may include a plurality of electrodes, and each electrode may include a plurality of sub-electrodes. For instance, a first sub-electrode and a second sub-electrode may be disposed on opposite sides of a third sub-electrode. In some cases, a first bias voltage may be applied to the third sub-electrode and a second bias voltage may be applied to the first and second sub-electrodes while causing at least one of the first sub-electrode, the second sub-electrode, or the third sub-electrode to transmit and/or receive ultrasonic energy. For example, the second bias voltage may be applied at a different voltage amount than the first bias voltage, and/or may be applied at a different timing than the first bias voltage.
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