Vibration measurement method for moving part, vibration measurement method for robot, and control device

摘要

A vibration measurement method for a moving part is a vibration measurement method in which vibration of a moving part is measured using a first inertial sensor. The method includes: performing measurement by the first inertial sensor in a state where the moving part is resonating, driven by a drive unit which drives the moving part; and finding a magnitude of vibration of the moving part, based on an output from the first inertial sensor. An example of the moving part may be a plurality of arms or the like provided in such a way as to be able to rotate about a rotation axis.