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Optical detection of tracer gases in a gas discharge cell having unexposed electrodes

机译:带有未暴露电极的气体放电室中示踪气体的光学检测

摘要

Tracer gas sensing device comprising a gas discharge cell having cell walls defining a discharge volume and a tracer gas inlet into the discharge volume, an optical spectrometer arrangement having a radiation source on a first side of the discharge cell for emitting radiation into the discharge cell and a radiation detector on a second side of the discharge cell opposite to the first side for detecting radiation which was emitted by the radiation source through the discharge volume, and electrodes on opposing sides of the discharge cell for generating a plasma within the discharge cell, said electrodes being unexposed plasma electrodes. The discharge cell may be a dielectric barrier discharge cell and the electrodes may be powered by an AC power source.
机译:示踪气体感测装置,包括:气体放电室,其具有限定放电体积的单元壁;以及示踪气体入口,其进入放电体积;光学光谱仪装置,其在放电室的第一侧上具有辐射源,用于将辐射发射到放电室中;以及在放电室的与第一侧相反的第二侧上的辐射检测器,用于检测由辐射源通过放电体积发射的辐射,在放电室的相对侧上的电极用于在放电室中产生等离子体。电极是未暴露的等离子电极。放电单元可以是电介质阻挡放电单元,并且电极可以由AC电源供电。

著录项

  • 公开/公告号US10782237B2

    专利类型

  • 公开/公告日2020-09-22

    原文格式PDF

  • 申请/专利权人 INFICON GMBH;

    申请/专利号US201615768351

  • 发明设计人 VLADIMIR SCHWARTZ;BORIS CHERNODBROD;

    申请日2016-10-14

  • 分类号G01N21/67;G01N21/68;G01M3/22;H05H1/24;G01N21/31;G01M3/20;H05H1/10;

  • 国家 US

  • 入库时间 2022-08-21 11:30:28

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