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Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same
Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same
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机译:在高温环境下测量射频功率的电压电流探头及其校准方法
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摘要
A voltage-current sensor enables more accurate measurement of the voltage, current, and phase of RF power that is delivered to high-temperature processing region. The sensor includes a planar body comprised of a non-organic, electrically insulative material, a measurement opening formed in the planar body, a voltage pickup disposed around the measurement opening, and a current pickup disposed around the measurement opening. Because of the planar configuration and material composition of the sensor, the sensor can be disposed proximate to or in contact with a high-temperature surface of a plasma processing chamber.
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