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Optical coupling structure for coupling an integrated silicon germanium photodetector/transimpedance amplifier and an integrated optics circuit
Optical coupling structure for coupling an integrated silicon germanium photodetector/transimpedance amplifier and an integrated optics circuit
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机译:用于耦合集成硅锗光电探测器/跨阻放大器和集成光学电路的光学耦合结构
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摘要
An optical device may include an optical coupling structure to couple a silicon-germanium photodetector to an integrated optics circuit. The optical coupling structure may comprise a silicon waveguide. The silicon waveguide may be tapered such that a thickness of the silicon waveguide at a first end of the optical coupling structure is smaller than a thickness of the silicon waveguide at a second end of the optical coupling structure, and may be tapered such that a width of the silicon waveguide at the first end is smaller than a width of the silicon waveguide at the second end. The optical coupling structure may include a silicon-nitride waveguide that covers the silicon waveguide, and is tapered such that a width of the silicon-nitride waveguide at the first end is smaller than a width of the silicon-nitride waveguide at the second end. The optical coupling structure may include a silica waveguide.
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