Substrate transport device, substrate processing apparatus including the substrate transport device, and substrate transport method

摘要

A portion position calculator calculates positions of first to fifth portions of a substrate on a hand based on detection signals of first to fifth detectors. An imaginary circle calculator calculates four different imaginary circles based on the positions of the first to fourth portions, respectively, to calculate a center position of each imaginary circle. A substrate position determiner calculates a plurality of amounts of deviation among the plurality of center positions. When all of the plurality of amounts of deviation are not more than a threshold value, the substrate position determiner determines a position of the substrate on the hand based on any or all of the four imaginary circles. When at least one of the plurality of amounts of deviation exceeds the threshold value, the substrate position determiner selects an imaginary circle of the four imaginary circles, which passes through the position of the fifth portion, and determines the position of the substrate on the hand based on the selected imaginary circle. A substrate transport operation is controlled based on a result of the determination.