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Multi-faceted MEMS mirror device useful for vehicle LIDAR
Multi-faceted MEMS mirror device useful for vehicle LIDAR
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机译:适用于车辆激光雷达的多面MEMS反射镜装置
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摘要
An illustrative example MEMS device includes a base and a plurality of mirror surfaces supported on the base. The plurality of mirror surfaces are respectively in a fixed position relative to the base. The plurality of mirror surfaces are at respective angles relative to a reference. The respective angles of at least some of the mirror surfaces are different from the respective angles of at least some others of the mirror surfaces.
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