High-sensitivity sensor system, detection circuit, and detection method

摘要

It is an object of the present invention to reduce noise in a detection circuit for use in a sensor system.;According to an aspect of the present invention, provided is a high-sensitivity sensor system which includes an acceleration sensor, a detection circuit system that detects an output of the acceleration sensor, a feedback circuit system including a reference voltage power source that generates a feedback signal to be fed back to the acceleration sensor based on an output of the detection circuit system, and a correction circuit system. The correction circuit system includes a reference power source variation detection circuit that detects a variation component from a reference voltage of the reference voltage power source, an output signal error calculation circuit that receives an output of the reference power source variation detection circuit as an input, and calculates a change in the variation component up to the output of detection circuit system via the acceleration sensor, and an operation circuit that subtracts an output of the output signal error calculation circuit from the output of the detection circuit system.