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High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz Bessel beam
High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz Bessel beam
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机译:使用太赫兹贝塞尔光束的高分辨率太赫兹波集中模块,散射光检测模块和高分辨率检查设备
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摘要
A high resolution inspection apparatus using a terahertz Bessel beam. The high resolution inspection apparatus comprises a terahertz wave generating unit for generating a terahertz wave; a Bessel beam forming unit for forming a terahertz Bessel beam at an inspection target object using a terahertz wave incident from the terahertz wave generating unit; a first lens for changing an angle of the terahertz wave radiated, when the terahertz Bessel beam is transmitted through the inspection target object, to be smaller; a second lens for concentrating the terahertz wave passing through the first lens and toward a detection unit; and a terahertz wave detection unit for detecting the terahertz wave concentrated by the second lens.
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