HIGH-RESOLUTION TERAHERTZ WAVE CONCENTRATION MODULE, SCATTERED LIGHT DETECTION MODULE, AND HIGH-RESOLUTION INSPECTION APPARATUS USING TERAHERTZ BESSEL BEAM

摘要

A high resolution inspection apparatus using a terahertz Bessel beam. The high resolution inspection apparatus comprises a terahertz wave generating unit for generating a terahertz wave; a Bessel beam forming unit for generating a terahertz Bessel beam using the terahertz wave incident from the terahertz wave generating unit; a ring beam forming unit for forming a ring beam using the terahertz Bessel beam and concentrating the formed ring beam to an inspection target object; a scattered light detecting unit for detecting scattered light generated from the inspection target object; and a ring beam detecting unit for detecting a ring beam transmitted through the inspection target object.