Method of driving vibration actuator with enhanced sliding efficiency, vibration drive device, and mechanical apparatus

摘要

A vibration actuator includes a vibration element including a piezoelectric element as an electromechanical energy conversion element and an elastic body which is joined to the piezoelectric element, and a driven element which is brought into pressure contact with the elastic body. Driving vibration is excited in the vibration element by applying a drive signal to the piezoelectric element, whereby the vibration element and the driven element are moved relative to each other. The driving vibration is a vibration in which at least n-th-order vibration and 2n-th-order vibration are combined, n being a natural number.