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Photodiode device monolithically integrating waveguide element with photodiode element type of optical waveguide

机译:光电二极管装置将波导元件与光波导的光电二极管元件类型单片集成

摘要

A photodiode (PD) device that monolithically integrates a PD element with a waveguide element is disclosed. The PD device includes a conducting layer with a first region and a second region next to the first region, where the PD element exists in the first region, while, the waveguide element exists in the second region and optically couples with the PD element. The waveguide element includes a core layer and a cladding layer on the conducting layer, which forms an optical confinement structure. The PD element includes an absorption layer on the conducting layer and a p-type cladding layer on the absorption layer, which form another optical confinement structure. The absorption layer has a length at least 12 μm measured from the interface against the core layer.
机译:公开了一种将PD元件与波导元件单片集成的光电二极管(PD)装置。 PD器件包括导电层,该导电层具有第一区域和紧邻第一区域的第二区域,其中PD元件存在于第一区域中,而波导元件存在于第二区域中并与PD元件光学耦合。波导元件包括芯层和在导电层上的包层,其形成光学限制结构。 PD元件包括在导电层上的吸收层和在吸收层上的p型覆层,它们形成另一光学限制结构。吸收层从界面到芯层的长度至少为12μm。

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