AN ANTI-STICTION FLEXIBLE MOLD AND A METHOD FOR FABRICATING THE SAME

摘要

This application relates to an anti-stiction flexible mold comprising a layer of an anti-stiction silicon dioxide deposited onto a flexible substrate. There is also provided a method for fabricating an anti-stiction flexible mold comprising the steps of a) depositing a layer of silicon dioxide on a flexible substrate; and b) interacting the layer of silicon dioxide with an anti-stiction agent to form the anti-stiction flexible mold. The resulting anti-stiction flexible mold may have superior anti-stick properties and may enable easy separation of mold and substrates after imprinting.