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COATING STRESS MITIGATION THROUGH FRONT SURFACE COATING MANIPULATION ON ULTRA-HIGH REFLECTORS OR OTHER OPTICAL DEVICES
COATING STRESS MITIGATION THROUGH FRONT SURFACE COATING MANIPULATION ON ULTRA-HIGH REFLECTORS OR OTHER OPTICAL DEVICES
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机译:通过超高反射镜或其他光学设备进行前表面涂层涂层的涂层应力消除
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摘要
An apparatus includes an optical device that includes a substrate, a first layer of material over the substrate, and a second layer of material comprising an optical coating over the first layer of material. The first layer of material creates a first stress within the optical device that counteracts a second stress within the optical device created by the second layer of material. The optical device may also include a third layer of material positioned between the substrate and the first layer of material. In some cases, the second layer of material creates a compressive stress within the optical device, and the first layer of material creates a tensile stress within the optical device that counteracts the compressive stress within the optical device.
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