METHOD FOR PRODUCING A 3D STRUCTURE BY MEANS OF LASER LITHOGRAPHY, AND CORRESPONDING COMPUTER PROGRAM PRODUCT

摘要

A system, computer program product and method for producing a three-dimensional overall structure by means of laser lithography, the overall structure being approximated by at least one partial structure, wherein, for the purposes of writing the partial structure, an exposure dose is radiated into the lithography material in a focal region of a laser writing beam while exploiting multi-photon absorption. Here, in the partial structure, the exposure dose in those edge portions that immediately adjoin an external surface of the overall structure to be produced is modified in comparison with the remaining partial structure.