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CAPACITOR STRUCTURE WITH CORRELATED ERROR MITIGATION AND IMPROVED SYSTEMATIC MISMATCH IN TECHNOLOGIES WITH MULTIPLE PATTERNING
CAPACITOR STRUCTURE WITH CORRELATED ERROR MITIGATION AND IMPROVED SYSTEMATIC MISMATCH IN TECHNOLOGIES WITH MULTIPLE PATTERNING
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机译:多重图案化技术中具有相关误差消除和改进的系统失配的电容器结构
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摘要
Capacitor arrays and methods of operating a digital to analog converter are described. In an embodiment, a capacitor array includes a unit capacitor (Cu) structure characterized by a unit capacitance value, a plurality of different super-unit capacitor structures, and a plurality of different sub-unit capacitor structures, each different sub-unit capacitor structure having a different capacitance defined by a division of the unit capacitance value.
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