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SYSTEM AND METHOD FOR SYNTHESIS OF GRAPHENE QUANTUM DOTS

机译:石墨烯量子点的合成系统和方法

摘要

The embodiments herein provide a system and a method for the synthesis of Graphene Quantum Dots (GQDs) for use in applications like nano-electronics, photonics, bio-imaging, energy storage, quantum computing, etc. Cu substrate is placed inside the CVD tube, and the CVD Chamber is sealed. The process parameters for CVD process are set up. Precursor gases injected inside the tube are dissociate to form carbon dimers and trimmers. Upon cooling semi-cyrstalline carbon film deposits inside the CVD tube. Oxidizing gas mixture is injected to convert amorphous C in semi-cyrstalline carbon film to CO2/CO. Graphene Quantum Dots (GQDs) so formed are carried with the gas flow and deposited at the cooler end of tube. The scrapper assembly is inserted in the CVD Tube and the reagent is sprayed inside the tube to disperse these GQDs in the reagent. This dispersion is pumped out of the CVD Chamber.
机译:本文的实施方案提供了用于石墨烯量子点(GQD)的合成的系统和方法,该系统和方法用于诸如纳米电子学,光子学,生物成像,能量存储,量子计算等的应用。Cu衬底放置在CVD管内,并且CVD室被密封。设置用于CVD工艺的工艺参数。注入管内的前体气体解离形成碳二聚物和三聚物。冷却后,半结晶碳膜沉积在CVD管内。注入氧化性气体混合物以将半结晶碳膜中的无定形C转化为CO 2 / CO。如此形成的石墨烯量子点(GQD)随气流携带并沉积在管的较冷端。刮板组件插入CVD管中,并将试剂喷洒在管内,以将这些GQD分散在试剂中。该分散体被泵出CVD室。

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