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Methods Of Forming An Array Comprising Pairs Of Vertically Opposed Capacitors And Arrays Comprising Pairs Of Vertically Opposed Capacitors

机译:形成包括成对的垂直相对电容器的阵列的方法和包括成对的垂直相对电容器的阵列的方法

摘要

A method of forming an array comprising pairs of vertically opposed capacitors comprises forming a conductive lining in individual capacitor openings in support material. An elevational mid-portion of individual of the conductive linings is removed to form an upper capacitor electrode lining and a lower capacitor electrode lining that are elevationally separate and spaced from one another in the individual capacitor openings. A capacitor insulator is formed laterally outward of the upper and lower capacitor electrode linings. Conductive material is formed laterally outward of the capacitor insulator to comprise a shared capacitor electrode that is shared by vertically opposed capacitors in individual of the pairs of vertically opposed capacitors. Other methods and structure independent of method of manufacture are disclosed.
机译:一种形成包括成对的垂直相对的电容器的阵列的方法,包括在支撑材料的各个电容器开口中形成导电衬里。去除各个导电衬里的高程中间部分,以形成在各个电容器开口中彼此高度分离并彼此隔开的上电容器电极衬里和下电容器电极衬里。在上部和下部电容器电极衬里的横向外侧形成电容器绝缘体。导电材料形成在电容器绝缘体的横向外侧,以包括共享的电容器电极,该电容器电极由成对的竖直对置电容器中的竖直对置电容器共享。公开了与制造方法无关的其他方法和结构。

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