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Methods Of Forming An Array Comprising Pairs Of Vertically Opposed Capacitors And Arrays Comprising Pairs Of Vertically Opposed Capacitors
Methods Of Forming An Array Comprising Pairs Of Vertically Opposed Capacitors And Arrays Comprising Pairs Of Vertically Opposed Capacitors
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机译:形成包括成对的垂直相对电容器的阵列的方法和包括成对的垂直相对电容器的阵列的方法
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摘要
A method of forming an array comprising pairs of vertically opposed capacitors comprises forming a conductive lining in individual capacitor openings in support material. An elevational mid-portion of individual of the conductive linings is removed to form an upper capacitor electrode lining and a lower capacitor electrode lining that are elevationally separate and spaced from one another in the individual capacitor openings. A capacitor insulator is formed laterally outward of the upper and lower capacitor electrode linings. Conductive material is formed laterally outward of the capacitor insulator to comprise a shared capacitor electrode that is shared by vertically opposed capacitors in individual of the pairs of vertically opposed capacitors. Other methods and structure independent of method of manufacture are disclosed.
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