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System and Method for Making Electronic Structures and Antenna Coupled Terahertz Film with Nanoimprint or Roll-to-Roll
System and Method for Making Electronic Structures and Antenna Coupled Terahertz Film with Nanoimprint or Roll-to-Roll
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机译:用纳米压印或卷对卷制作电子结构和天线耦合太赫兹薄膜的系统和方法
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摘要
An ACT film has a plurality of rectenna, each having having an antenna and a diode. The ACT film is manufactured using nanoimprint lithography and roll-to-roll processes. An imprint template is overlaid on a feedstock that has two metal layers separated by one or more oxide layers. The feedstock is etched to expose the lower metal layer. The lower metal layer is undercut to create a discontinuity in the lower metal layer to avoid a short to the diode in the rectenna. A metamaterial film is also made. To complete manufacture of the ACT film, the rectenna film and the metamaterial film are aligned to ensure the rectennas in the rectenna film are located over the holes in the metamaterials in the metamaterial film. Once aligned, the rectenna film and the metamaterial films are bonded together.
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