SYSTEM AND METHOD FOR MAKING ELECTRONIC STRUCTURES AND ANTENNA COUPLED TERAHERTZ FILMS WITH NANOIMPRINT OR ROLL-TO-ROLL

摘要

An ACT film has a plurality of rectenna, each having having an antenna and a diode. The ACT film is manufactured using nanoimprint lithography and roll-to- roll processes. An imprint template is overlaid on a feedstock that has two metal layers separated by one or more oxide layers. The feedstock is etched to expose the lower metal layer. The lower metal layer is undercut to create a discontinuity in the lower metal layer to avoid a short to the diode in the rectenna. A metamaterial film is also made. To complete manufacture of the ACT film, the rectenna film and the metamaterial film are aligned to ensure the rectennas in the rectenna film are located over the holes in the metamaterials in the metamaterial film. Once aligned, the rectenna film and the metamaterial films are bonded together.