Framework for a replication device, replication device as well as method for producing nanostructured and/or microstructured components by means of a replication device

摘要

A framework for a replication device for producing nanostructured and/or microstructured components forms a gimbal suspension. In addition, a replication device is provided including such a framework. Further, a method is described for producing nanostructured and/or microstructured components by imprint lithography using a replication device.