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SYSTEM FOR DESIGNING INTEGRATED CIRCUIT USING EXTRACTED MODEL PARAMETER AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT USING THE SAME
SYSTEM FOR DESIGNING INTEGRATED CIRCUIT USING EXTRACTED MODEL PARAMETER AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT USING THE SAME
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机译:使用提取的模型参数设计集成电路的系统和使用该模型制造集成电路的方法
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摘要
A method of manufacturing an integrated circuit in which a semiconductor device is provided includes simulating electrical characteristics of the semiconductor device according to a received process variable, by using a model parameter file including a plurality of model parameters, generating semiconductor device layout data based on a result of the simulation, and manufacturing the integrated circuit according to a semiconductor device layout based on the semiconductor device layout data, wherein the plurality of model parameters are stored in the model parameter file in a form of at least one function regarding the process variable.
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