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USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS
USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS
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机译:将绝对Z高度值用于工具之间的协同作用
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摘要
A semiconductor review tool receives absolute Z-height values for the semiconductor wafer, such as a semiconductor wafer with a beveled edge. The absolute Z-height values can be determined by a semiconductor inspection tool. The semiconductor review tool reviews the semiconductor wafer within a Z-height based on the absolute Z-height values. Focus can be adjusted to within the Z-height.
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