METHOD FOR THE PRODUCTION OF THIN-FILM LITHIUM-ION MICROBATTERIES AND RESULTING MICROBATTERIES

摘要

Process for fabrication of all-solid-state thin film batteries, said batteries comprising a film of anode materials (anode film), a film of solid electrolyte materials (electrolyte film) and a film of cathode materials (cathode film) in electrical contact with a cathode collector, characterized in that:a first electrode film (cathode or anode) is deposited by electrophoresis on a conducting substrate or a substrate with at least one conducting zone, said substrate or said at least one conducting zone possibly being used as a collector of said electrode current (anode or cathode current) of the micro-battery,the electrolyte film is deposited by electrophoresis on said first electrode film,a second electrode film (anode or cathode) is deposited on the electrolyte film either by electrophoresis or by a vacuum deposition process.