UNSUPERVISED CLUSTERING TO IDENTIFY ANOMALIES

摘要

Images are accessed representing a status in a fabrication of a semiconductor chip corresponding to a particular stage in the fabrication. Distortion is removed from the images and actual features of the semiconductor chip are extracted from the images. Synthesized ideal features of the semiconductor chip associated with completion of the particular stage in the fabrication are determined from the one or more images. The actual features are compared to the ideal features to determine whether anomalies associated with the particular stage exist in the semiconductor chip