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APPARATUS AND METHODS FOR EDGE RING REPLACEMENT, INSPECTION AND ALIGNMENT USING IMAGE SENSORS
APPARATUS AND METHODS FOR EDGE RING REPLACEMENT, INSPECTION AND ALIGNMENT USING IMAGE SENSORS
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机译:使用图像传感器进行边缘环更换,检查和校准的装置和方法
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摘要
A first edge ring is removed from a substrate support within a process module using a transfer robot. The transfer robot is then used to place a second edge ring on the substrate support. An image sensor (e.g., a disk-shaped wireless image sensor) is positioned over the second edge ring using the transfer robot. The image sensor generates image information, which is analyzed to determine alignment of the second edge ring.
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