PLATE TRANSPORTATION DEVICE AND PLATE PROCESSING DEVICE PROVIDED WITH THE SAME, AND METHOD OF TRANSPORTING PLATES AND METHOD OF PROCESSING PLATES USING THE PLATE TRANSPORTATION DEVICE

摘要

a plate transport device (10) includes: a retention mechanism (17) configured to retain suction members (11,12) in a state where the suction surfaces are spaced apart from one another over a circumference of a circle around a first geometric axis (j1) and the suction members (11, 12) are rotatable around the first geometric axis (j1); and a drive device (14) including a rotary axis (14b) which is rotatable about a second axis (j2) parallel to the first axis (j1) and a connection mechanism configured to connect the rotary axis (14b) and the suction members (11 12) for each other; and a support mechanism configured to support the retention mechanism (17) and the drive device (14). the connection mechanism is connected to the suction members (11, 12) in a state where the suction members (11, 12) are movable in a radial direction of the circle around the first geometric axis (j1). the support mechanism supports the retention mechanism (17) and the drive device (14) so that the retention mechanism (17) and the drive device (14) are relatively movable from each other in a direction orthogonal to the first geometric axis (j1).