METHOD OF MANUFACTURING MULTI-ELECTRODE GAS-ANALYTICAL CHIP BASED ON TITANIUM DIOXIDE NANOTUBE MEMBRANES

摘要

The invention relates to the field of sensor technology and nanotechnologies, in particular to methods of manufacturing apparatuses for recognizing and detecting gas mixture components. A method of manufacturing a multi-electrode gas-analytical chip based on titanium dioxide nanotube membranes includes formation of ordered array of TiO₂ nanotubes from titanium by electrochemical anodization in fluoride electrolyte with the consequent dissolution of the titanium substrate in methyl alcohol with the addition of bromine, washing the resulting membrane in alcohols and drawing it from the solution to the chip substrate surface on which the strip electrodes are formed (or were preformed earlier) to enable electrical measurements of resistances of the membrane sites. In the operation the chip is exposed to the gas environment, the resistance change in segments of titanium dioxide nanotube membrane is recorded, which are placed between each pair of the strip electrodes, and the vector signal is treated from the entire set of segments by methods of pattern recognition to determine the gas composition. The result is producing a highly sensitive and gas-selective multi-electrode gas-analytical chip in a fairly simple method with a low cost.