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Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms

机译:使用反射镜和/或棱镜的激光重复率倍增器和平顶光束轮廓发生器

摘要

A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
机译:一种重复率(脉冲)倍增器,包括一个或多个分束器和多个棱镜,这些棱镜形成一个或多个环形腔,这些环形腔具有不同的光程长度,从而延迟了每个脉冲能量的一部分。一系列输入激光脉冲在环形腔中循环,并且每个脉冲的一部分能量在穿过较短的腔路径后离开系统,而另一部分能量在穿过较长的腔路径后离开系统,和/或两个腔路径。由环形腔的光路长度的适当选择,输出激光脉冲序列的重复率可被制成为输入重复率的倍数。输出脉冲的相对能量可以通过选择分束器的透射系数和反射系数来控制。一些实施例产生在一个维度上基本平坦的时间平均输出光束轮廓。

著录项

  • 公开/公告号IL248648A

    专利类型

  • 公开/公告日2020-05-31

    原文格式PDF

  • 申请/专利权人 KLA-TENCOR CORPORATION;

    申请/专利号IL20160248648

  • 发明设计人

    申请日2016-10-31

  • 分类号G03F7/20;H01S3;H01S3/08;H01S3/083;H01S3/10;H01S3/139;

  • 国家 IL

  • 入库时间 2022-08-21 11:17:18

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