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Method of making target and target

机译:制定目标的方法和目标

摘要

The method of conducting a trade fair for a magnetron comprising the stage of forming (1) of the first material and insert (2) of the second material at least partially overlapping with the plasma digestion channel (3) of that magnetron shall be characterised by making at least in the form (1) of the first material: one depth (4),at least partially overlapping with plasma digestion channel (3),and the second material insert (2) is made by inserting the powder into that hole (4),and then the material is consolidated by affecting it with a combustion charge in the working gas. The magnetron target shall contain a shape (1) of the first material containing at least one depth (4),at least partially overlapping with the plasma digestion channel (3) filled with an insert (2) of the second material (2) made during the process of consolidation of the powdered second material (2) in the batch release.
机译:进行磁控管交易会的方法,其特征在于,包括以下步骤:形成第一材料的步骤(1)和第二材料的插入件(2)与该磁控管的等离子体消化通道(3)至少部分重叠。至少以第一材料的形式(1)制成:一个深度(4),与血浆消解通道(3)至少部分重叠,第二材料插入件(2)是通过将粉末插入该孔( 4),然后通过在工作气体中燃烧加料来影响材料使其固结。磁控管靶应包含至少具有一个深度(4)的第一种材料的形状(1),并与填充有第二种材料(2)的插入物(2)的血浆消解通道(3)至少部分重叠。在分批释放中第二粉末材料(2)固结的过程中。

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