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SYSTEM AND METHOD FOR METROLOGY USING MULTIPLE MEASUREMENT TECHNIQUES
SYSTEM AND METHOD FOR METROLOGY USING MULTIPLE MEASUREMENT TECHNIQUES
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机译:利用多种测量技术进行计量的系统和方法
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摘要
Systems and methods for detecting complementary sets of data during a chemical vapor deposition process are disclosed herein. The systems and methods reduce use of limited window space in a chemical vapor deposition reactor, while obtaining useful data for a variety of phases in the epitaxial growth of a structure therein.
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