[Problem] To present a more suitable configuration for a vacuum ultraviolet polarization element that can be used in processing such as photo-alignment, and to provide a suitable technical configuration for photo-alignment that relies on vacuum ultraviolet light. [Solution] A grid 2 disposed on a transparent substrate 1 comprises numerous linear sections 3 extending in parallel. The material of each of the linear sections 3 is an oxide of a group 3 or group 4 element, such as hafnium oxide, and has a PE, which is obtained by the formula PE = T2 × log10(ER) (where T is transmittance and ER is the extinction ratio), of at least 0.2 when a combination of optical constants that results in a PE that reaches the maximum in the vacuum ultraviolet region is used. Spaces between the linear sections 3 are empty and have no filler, and the space where a vacuum ultraviolet polarization element 6 is disposed is replaced with an inert gas. For photo-alignment, a workpiece 10 is placed 1–20 mm from the vacuum ultraviolet polarization element, and the irradiance of the vacuum ultraviolet light is 40–4,000 mJ/mm2.
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机译：[问题]为了提供可用于诸如光取向的处理的真空紫外偏振元件的更合适的构造，并提供依赖于真空紫外光的光取向的合适的技术构造。 [解决方案]布置在透明基板1上的栅格2包括许多平行延伸的线性部分3。每个线性部分3的材料是第3族或第4族元素的氧化物，例如氧化ha，并具有PE，其由下式获得：PE = T 2 ×log 10 （ER）（其中T为透射率，ER为消光比），当使用光学常数的组合（导致PE在真空紫外线区域达到最大值）时，至少为0.2 。线性部分3之间的空间是空的并且没有填充物，并且设置有真空紫外线偏振元件6的空间被惰性气体代替。为了进行光对准，将工件10放置在距真空紫外偏振元件1–20 mm处，并且真空紫外光的辐照度为40–4,000 mJ / mm 2 。
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