ELECTRODE ARRANGEMENT FOR A MICRO-ELECTRO-MECHANICAL SYSTEM, MICRO-ELECTRO-MECHANICAL SYSTEM, AND METHOD FOR OPERATING A MICRO-ELECTRO-MECHANICAL SYSTEM

摘要

The invention relates to an electrode arrangement for a micro-electro-mechanical system, comprising a first electrode structure and a second electrode structure, wherein the first electrode structure has a receptacle, the second electrode structure has a finger, and the first and second electrode structures are designed for relative movement with respect to one another along an axis of movement, characterised in that a first width of the receptacle perpendicular to the axis of movement tapers along the axis of movement at least in a first region, and/or in that a second width of the finger perpendicular to the axis of movement tapers along the axis of movement at least in a second region.