ELECTROCHEMICAL GRAPHENE TRANSFER METHOD ASSISTED BY MULTIPLE SUPPORTING FILMS

摘要

The invention discloses an electrochemical graphene transfer method assisted by multiple supporting films, which includes: (1) growing graphene on a substrate, and then spin-coating a thin layer of photoresist as a first film; (2) spin-coating n thick polymer films, which have a certain toughness and which can be selectively dissolved, on the surface of the first film as a top film, where 1 ≤ n ≤ 10; (3) separating the multilayer composite film and the graphene from the surface of the substrate by using an electrochemical method, and dissolving the upper thick polymer film using a first solvent; (4) after cleaning, transferring the first film and the graphene to a target substrate, and finally dissolving the first film with a second solvent to complete the transfer. In the transfer method of the present invention, the graphene has high quality and few defects, the transfer process is fast and has excellent stability, is capable of achieving a large-scale transfer, and can broaden the scope of application of graphene.