SNAPSHOT FULL-FIELD WHITE LIGHT INTERFERENCE MICROSCOPIC MEASUREMENT METHOD AND DEVICE THEREOF

摘要

A snapshot full-field white light interference microscopic measurement method and a device thereof. On the basis of a white light interference microscopic measurement method and a snapshot spectral imaging and detecting technology, polychromatic parallel light passes through an axial dispersion-type interferential optical system and is dispersed successively in the axial direction and is focused, in one-to-one correspondence, on positions having different axial depths, the intensity of a white light interference signal on a spectral domain varies with wavelengths and reaches a maximum value at the focal plane of certain monochromatic light obtained by axial dispersion, so that unique coding between a white light interference signal, a spectrum, and a depth can be established, realizing measurement of distribution of three-dimensional morphology of an element to be detected.