METHOD FOR MANUFACTURING A SUPERCONDUCTING LC-TYPE RESONATOR AND SUPERCONDUCTING RESONATOR THUS OBTAINED

摘要

The invention relates to a method for manufacturing a superconducting LC-type resonator of the type comprising at least one high-resistivity substrate (1) on which are printed an inductive meander (3), a first so-called lower electrode (41) and a second so-called upper electrode (40) arranged opposite the first so as to form together a capacitor (4) connected in parallel with the inductive meander (3), as well as inductive coupling means (2) dedicated to said resonator, in which a sacrificial aluminium layer is deposited between the first and second electrodes. The invention also relates to the superconducting LC-type resonator thus obtained and to the use of such a resonator for detecting the noise of a millimetre photon.