METHOD AND DEVICE FOR SIMULTANEOUSLY DETECTING ELEMENTS, DEFECTS AND RESIDUAL STRESS

摘要

Disclosed are a multi-functional laser photoacoustic detection method and device for elements, defects and residual stress, relating to the technical field of laser material detection. A pulsed laser device (6) emits pulsed laser onto the surface of a sample to be detected (7) to generate plasma and ultrasonic wave for simultaneously detecting and analyzing elementary composition, structure defects and residual stress of the sample. The detection device comprises an excitation unit, a spectrum detection unit, an ultrasonic wave detection unit and an analysis and control unit. A digital time delayer (5) is connected to a computer (1); a high precision 3D displacement platform (4) is electrically connected to the digital time delayer (5); the pulsed laser device (6) emits a pulsed laser, and a light path system modulates, focuses, and directs the pulsed laser onto the surface of the sample to be detected (7) so as to simultaneously generate plasma and ultrasonic wave. The ultrasonic wave detection unit is used for detecting ultrasonic waves, and the spectrum detection unit is used for detecting the spectrum of visible light emitted by plasma flame.