MOUNTING DEVICE AND MOUNTING METHOD FOR GRATING RULER, GRATING MEASUREMENT SYSTEM AND LITHOGRAPHY MACHINE

摘要

A mounting device and a mounting method for a grating ruler, a grating measurement system and a lithography machine. The mounting device for a grating ruler comprises a mounting base plate (10) and an adaptive structure, one end face of the mounting base plate (10) being provided with a through hole (15), the through hole (15) being used for providing an optical path channel of a projection and exposure optical system of a lithography machine. The grating ruler (16) is connected to one end face of the mounting base plate (10), the adaptive structure comprises a flexible block (11), a stiffness damper (12) and a vibration absorption damper (13), and the flexible block (11), the stiffness damper (12) and the vibration absorption damper (13) are fixedly connected to the other end face of the mounting base plate (10). In this way, the influence of external heat transfer, vibration of a main substrate (14), thermal deformation of the main substrate (14), and air pressure fluctuation generated by a workpiece table (20) in a high-speed movement process on the measurement stability of the grating ruler (16) of the workpiece table (20) are reduced, thereby improving the measurement accuracy of the grating ruler (16) of the workpiece table (20).