FILM THICKNESS GAUGE BY NEAR-INFRARED HYPERSPECTRAL IMAGING

摘要

The present teachings include a method of measuring an entire film thickness. The method may include forming a polymeric film (10) and measuring the thickness of the film (10) with a camera (20) collecting spatial and spectral images of a plurality of points at one time. The camera may collect a line image from a line of the film. The camera may be a hyperspectral near-infrared camera. In analyzing raw data collected during the measuring step, fringes of the raw data may be corrected using a classical least squares analysis.