MICRO-NANO CHANNEL STRUCTURE AND PREPARATION METHOD THEREFOR, SENSOR AND PREPARATION METHOD THEREFOR, AND MICROFLUIDIC DEVICE

摘要

A micro-nano channel structure (20) and a preparation method therefor, a sensor (2) and a preparation method therefor, as well as a microfluidic device (40). The micro-nano channel structure (20) comprises: a base substrate (21); a base layer (22), provided on the base substrate (21) and comprising a plurality of protrusions (26); a channel wall layer (23), located on the side of the plurality of protrusions (26) away from the base substrate (21) and having micro-nano channels (24) therein. Recesses (27) are provided between adjacent protrusions (26) among the plurality of protrusions (26). The orthographic projections of the micro-nano channels (24) on the base substrate (21) are located within the orthographic projections of the recesses (27) on the base substrate (21). The micro-nano channels (24) have high resolution or ultra-high resolution and can have different sizes and shapes, so as to meet different needs in practical applications, while reducing process steps and production costs.