COPPER ION TREATMENT SYSTEM AND WASTE WATER TREATMENT SYSTEM THEREOF

摘要

Disclosed are a copper ion treatment system (1) and a waste water treatment system (2) thereof, wherein the copper ion treatment system (1) comprises: a etching tool (11) for performing an etching process with a copper etching liquid; a neutralization unit (12), in communication with the etching tool (11), for collecting and neutralizing the copper etching liquid from the etching tool (11); a copper ion-removal unit (13), in communication with the neutralization unit (12), for collecting the neutralized copper etching liquid from the neutralization unit (12) and separating the copper ions from the copper etching liquid; and a supplementary unit (14) for the copper etching liquid in communication with the copper ion-removal unit (13) and the etching tool (11), for receiving the copper etching liquid from the copper ion-removal unit (13), and adjusting the ratio of the copper etching and then sending same back to the etching tool (11) for an etching process; and the waste water treatment system (2) comprises: a waste water recovery unit (21); a waste water neutralization unit (22); and a waste water copper ion-removal unit (23).