JET-CONSTRAINED FEMTOSECOND LASER ULTRA-PRECISION MACHINING SYSTEM AND METHOD

摘要

Provided is a jet-constrained femtosecond laser ultra-precision machining system, which comprises a B-axis workbench (1), a liquid tank (2), a laser jet coupling device (9), a plane mirror (11), a plane-convex lens (10), an adjusting block (8), a first reflecting mirror (5), a second reflecting mirror (7), a bracket (4) and a C-axis chuck (3), in operation, under the control of an ultra-precision CNC machine tool, the B-axis workbench (1) and C-axis chuck (3) can rotate around the axis and move along the axis, after being focused, a femtosecond laser (6) has a coupling effect with the jet and reaches the surface of a workpiece, at the same time, a chemical solution has a micro-corrosion effect with the machined surface of the workpiece and removes defects such as a surface deterioration layer, then impurities such as debris generated in the machining and chemical reaction processes are removed under the action of the water jet, to improve the quality of the machined surface, in combination with five-axis linkage of the C-axis chuck and the B-axis workbench, three-dimensional structured micro-machining of workpieces with arbitrary shapes such as a flat or free-form surface can be completed, the types of the workpiece surface machined by femtosecond laser are expanded, and the purpose of a wide range of high-efficiency and high-quality machining is achieved.