Vaccum Jig Apparatus for Quart'z Ring and Quart'z Ring Manufacturing System having Thesame

摘要

The present invention relates to a vacuum jig device for processing a quartz ring and a quartz ring processing system having the same. According to the present invention, the quartz ring processing system having the vacuum jig device for processing a quartz ring comprises: the vacuum jig device including a quartz ring fixing portion formed of aluminum material and having a vacuum suction hole for absorbing the quartz ring for manufacturing a semiconductor in a vacuum manner, and including a resin molded body covering a portion in which the vacuum suction hole of the quartz ring fixing portion is located and formed on the surface of the quartz ring fixing portion to be in surface contact with the quartz ring; a vacuum filter portion for filtering water and foreign substances introduced through the vacuum jig device during a quartz ring processing process; a vacuum valve connected to the vacuum filter portion to transfer a negative pressure for adsorbing the quartz ring or to transfer an atmospheric pressure for separating the quartz ring; a vacuum generator for generating the negative pressure for adsorbing the quartz ring in a vacuum manner by using compressed air; an air tank storing the compressed air to be transferred at a constant pressure to the vacuum generator; and an air compressor which draws in and compress ambient air to create the compressed air stored in the air tank. The present invention provides the vacuum jig device for processing the quartz ring and the quartz ring processing system having the same, which can form a putty resin molded body on the surface of the aluminum jig in which a vacuum suction hole is formed, and can easily adjust the position of the quartz ring by adsorbing and fixing the quartz ring in the vacuum manner, thereby reducing the processing time and manufacturing costs of the quartz ring.