RGO Bio-Sensor Method for Manufacturing the Same and Method for Sensing Bio-Material Based on Reduced Graphene Oxide

摘要

The RGO-based biosensor according to the present invention includes a source electrode and a drain electrode formed on a substrate, a reduced graphene oxide (RGO) channel formed between the source electrode and the drain electrode, and a PDMS supplying a reaction solution to the RGO channel. A chip, a passivation layer for sealing the reaction solution supplied through the PDMS chip so as not to contact the source electrode and the drain electrode, and a gate electrode. At this time, the passivation layer is composed of SU-8 photoresist, and the gate electrode is configured to be in direct contact with the reaction solution to perform liquid phase driving. By constructing the passivation layer with SU-8, the reaction solution supply through the PDMS chip can be made conveniently and stably. Due to the liquid phase driving of the gate electrode, the gate voltage can be driven at a gate voltage of about -1.0 V to 1.0 V, thereby implementing a field effect transistor (FET) type biosensor having high sensitivity.